The 76th JSAP Autumn Meeting 2015
Session ID : 15p-PB2-51
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Decomposition of chlorosilane source by hydrogen radical generated by inductively coupled plasma
Keywords:
15p-PB2-51,
plasma
Details
Article 1st page
