The 76th JSAP Autumn Meeting 2015
Session ID : 15a-2Q-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Layer by layer etching of LaAlSiOx
*Kazuhito Furumoto, Kazuhisa Matsuda, Toshiyuki Sasaki, Mitsuhiro Omura, Itsuko Sakai, Hisataka Hayashi
Author information
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