The 76th JSAP Autumn Meeting 2015
Session ID : 15p-2A-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
3-nm-thick Si3N4 membranes for solid-state nanopores fabricated using the poly-Si sacrificial layer process
Details
Article 1st page
