The 76th JSAP Autumn Meeting 2015
Session ID : 14p-1C-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Preparation of low-k Materials by Thermal Oxidation of p Type Porous Si
Details
Article 1st page
