The 76th JSAP Autumn Meeting 2015
Session ID : 15a-1A-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Removal of damaged layer on 4H-SiC surface and its effects using Si-vapor etching
*Satoshi Torimi, Norihito Yabuki, Masato Shinohara, Youji Teramoto, Satoru Nogami, Tadaaki Kaneko
Author information
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