The 76th JSAP Autumn Meeting 2015
Session ID : 13p-1E-14
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
Proximity Gettering of Carbon Cluster Ion Irradiated Silicon Wafers - Defect Characterization of Carbon Cluster Projected Range by Laser Scattering -
*TAKESHI KADONO, RYOUSUKE OKUYAMA, RYOU HIROSE, YOSHIHIRO KOGA, HIDEIKO OKUDA, KAZUNARI KURITA
Author information
Details
Article 1st page
