The 76th JSAP Autumn Meeting 2015
Session ID : 16a-2W-2
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Autumn Meeting
Number :
76
Location :
[in Japanese]
Date :
September 13, 2015 - September 16, 2015
Development of a uniform-irradiation system of swift-heavy ions for manufacture of sensor chips