The 76th JSAP Autumn Meeting 2015
Session ID : 13p-2S-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 76
Location : [in Japanese]
Date : September 13, 2015 - September 16, 2015
A low-loss SiON optical waveguide fabricated by ECR-PE CVD with SiD4 gas
*Kota Okazaki, Hidetaka Nishi, Tatsurou Hiraki, Tai Tsuchizawa, Koji Yamada, Tsuyoshi Yamamoto
Author information
Keywords:
13p-2S-1,
silicon oxynitride (SiON) optical waveguide,
low-temperature deposition,
deuterated silane (SiD4)
Details
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