JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 63rd JSAP Spring Meeting 2016
Session ID : 20a-P1-8
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Growth of (Hf,Zr)O2 thin films on β- Ga2O3 single crystal substrates
*Kenshi TakadaTomoya KomaeTakuya KiguchiYukinori NoseTakeshi YoshimuraAtsushi AshidaNorifumi Fujimura
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Keywords: 20a-P1-8, (Hf,Zr)O2, Ga2O3
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© 2016 The Japan Society of Applied Physics
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