The 63rd JSAP Spring Meeting 2016
Session ID : 21p-S222-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Sputtering-Assisted Metalorganic Chemical Vapor Deposition and Its Application to Rare-Earth Doped ZnO
Keywords:
21p-S222-2,
sputtering-assisted metalorganic vapor phase deposition,
rare-earth doped semiconductor,
zinc oxide
Details
Article 1st page
