The 63rd JSAP Spring Meeting 2016
Session ID : 19a-S423-1
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Spring Meeting
Number :
63
Location :
[in Japanese]
Date :
March 19, 2016 - March 22, 2016
Fabrication and Characterization of SOI-CMOS Integrated Circuits by Minimal Fab and Mega Fab Hybrid Process