The 63rd JSAP Spring Meeting 2016
Session ID : 21a-P2-18
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Angle Dependence of ion implantation to Si using TCAD
*Takuma Adachi, Yuki Hirota, Yosuke Nakaguchi, Kota Takahama, Koji Mukai, Takeshi Tanaka
Author information
Details
Article 1st page
