The 63rd JSAP Spring Meeting 2016
Session ID : 21a-P3-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Relationship between optical emission spectroscopy of plasma and chemical composition of passivation film on sidewall etched by Deep-RIE
Details
Article 1st page
