The 63rd JSAP Spring Meeting 2016
Session ID : 21p-S322-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Thermal stability improvement of Pt ultrathin-film hydrogen sensor using TiN
Keywords:
21p-S322-8,
hydrogen sensor
Details
Article 1st page
