The 63rd JSAP Spring Meeting 2016
Session ID : 21a-H101-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Low resistance Ti-Si-C ohmic contact formation by Laser annealing on 4H-SiC C face
Details
Article 1st page
