The 63rd JSAP Spring Meeting 2016
Session ID : 21p-P10-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Shape control of SiC trench structure by Si-vapor ambient annealing
*Norihito Yabuki, Satoshi Torimi, Satoru Nogami, Tadaaki Kaneko, Makoto Kitabatake
Author information
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