The 63rd JSAP Spring Meeting 2016
Session ID : 20a-S222-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Transparent conductive ITO and IZO films deposited by reactive sputtering with plasma emission feedback system
*Yusuke Miyazaki, Eri Maruyama, Junjun Jia, Hironobu Machinaga, Tsukasa Miyazaki, Yuzo Shigesato
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