The 63rd JSAP Spring Meeting 2016
Session ID : 21p-P15-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 63
Location : [in Japanese]
Date : March 19, 2016 - March 22, 2016
Novel non-destructive thickness measurement method by a white light OCT with FDTD simulation for optical device fabrication
*Tsuyoshi Nishi, Nobuhiko Ozaki, Yoichi Oikawa, Kunio Miyaji, Hirotaka Ohsato, Eiichiro Watanabe, Naoki Ikeda, Yoshimasa Sugimoto
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