JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 77th JSAP Autumn Meeting 2016
Session ID : 15p-B8-14
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The impacts of fabrication error on spectral variation of silicon grating couplers
*Tsuyoshi HorikawaJun UshidaYohei SobuDaisuke ShimuraAkemi ShiinaMasatoshi TokushimaSeok-Hwan JeongKeizo KinoshitaTohru Mogami
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© 2016 The Japan Society of Applied Physics
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