The 77th JSAP Autumn Meeting 2016
Session ID : 14p-B7-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Control of Crystal Growth and Defects in Group IV Semiconductor Thin Films by Atmospheric Pressure Thermal Plasma Jet
Details
Article 1st page
