The 77th JSAP Autumn Meeting 2016
Session ID : 14p-B7-13
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Autumn Meeting
Number :
77
Location :
[in Japanese]
Date :
September 13, 2016 - September 16, 2016
Low-Temperature Solid-Phase Crystallization of a-Si, a-Ge Thin Films and Defect Formation During Its Process