The 77th JSAP Autumn Meeting 2016
Session ID : 13p-A41-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Effect of Width and Number of Slits in Faraday Shield on the Performance of Inductively Coupled Plasma
Keywords:
13p-A41-3,
Plasma Electronics English Session,
Plasma Processing,
Inductively coupled plasma
Details
Article 1st page
