The 77th JSAP Autumn Meeting 2016
Session ID : 13p-B8-3
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Control of point defects in Si wafer by ultrahigh-temperature RTP technique
Details
Article 1st page
