The 77th JSAP Autumn Meeting 2016
Session ID : 15p-B10-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
A Design of Spring Constant for MEMS Accelerometer by Multi-layer Metal Technology (I)
*TERUAKI SAFU, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida
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