The 77th JSAP Autumn Meeting 2016
Session ID : 15p-B10-8
Conference information
Host:
The Japan Society of Applied Physics
Name :
JSAP Autumn Meeting
Number :
77
Location :
[in Japanese]
Date :
September 13, 2016 - September 16, 2016
A Design of Spring Constant for MEMS Accelerometer by Multi-layer Metal Technology (I)