The 77th JSAP Autumn Meeting 2016
Session ID : 15p-B10-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Decomposition of SiCl4 at atmospheric pressure using hydrogen radical generated by thermal filament method
*Yuji Okamoto, Daiki Tsutsumi, Takamasa Ishigaki, Fatima Zohra Dahmani, Masatomo Sumiya
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