The 77th JSAP Autumn Meeting 2016
Session ID : 14a-P6-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Diffusion of Ga into SiO2 Films Deposited on GaN or AlGaN after Annealing Treatment
*Keita Kataoka, Masakazu Kanechika, Yuko Aoki, Hiroyuki Ueda, Tetsuo Narita, Yasuji Kimoto, Akira Uedono
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