The 77th JSAP Autumn Meeting 2016
Session ID : 14p-A25-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Optimization of structures in CZ furnace by numerical simulation for CZ-Si crystal growth
*Yuta Saibara, Taiki Komatsu, Hodaka Kutsukage, Toshinori Taishi, Keigo Hoshikawa
Author information
Keywords:
14p-A25-6,
simulation
Details
Article 1st page
