JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 77th JSAP Autumn Meeting 2016
Session ID : 16a-P5-29
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Deposition of GaN thin films by sputtering using Ga metal target or GaN target
*Ryo IshikawaYuji IsosakiYuichiro YamashitaTakashi YagiJunjun JiaNaoyuki TaketoshiShin-ichi NakamuraYuzo Shigesato
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© 2016 The Japan Society of Applied Physics
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