The 77th JSAP Autumn Meeting 2016
Session ID : 15p-P11-10
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Evaluation of Strained-Si formed by low-temperature Sputter Epitaxy Method
*Kyohei Degura, Akira Motohashi, Katsumi Okubo, Nobumitsu Hirose, Akifumi Kasamatsu, Takashi Mimura, Toshiaki Matsui, Takahiro Tsukamoto, Yoshiyuki Suda
Author information
Keywords:
15p-P11-10,
semiconductor
Details
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