The 77th JSAP Autumn Meeting 2016
Session ID : 15a-A23-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 77
Location : [in Japanese]
Date : September 13, 2016 - September 16, 2016
Annihilation behavior of oxygen precipitate nuclei in nitrogen doped Cz-silicon wafers by ultrahigh-temperature RTP
*Hideyuki Okamura, Haruo Sudo, Koji Araki, Hiroyuki Saito, Susumu Maeda, Koji Sueoka, Kozo Nakamura
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