The 64th JSAP Spring Meeting 2017
Session ID : 16a-F204-11
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Development of high-performance surface-type Ge photodiode on 300mm-diameter of SOI substrate for Si photonics integrated receiver circuit
*Junichi Fujikata, Keizo Kinoshita, Tsuyoshi Horikawa, Koichi Takemura, Daisuke Okamoto, Shigeki Takahashi, Masahiko Imai, Masataka Noguchi, Yasuyuki Suzuki, Mitsuru Kurihara, Takahiro Nakamura, Kazuhiko Kurata, Tohru Mogami
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