The 64th JSAP Spring Meeting 2017
Session ID : 15p-512-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Approach to single-digit-nanometer patterning in UV nanoimprinting by surface molecular science
Keywords:
15p-512-2,
UV nanoimprinting,
single-digit-nanometer patterning,
surface molecular science
Details
Article 1st page
