The 64th JSAP Spring Meeting 2017
Session ID : 14p-316-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Pressure Dependence of Rate of Resist Removal using Hydrogen radicals
*Tomohiro Shiroi, Masashi Yamamoto, Shiro Nagaoka, Tomokazu Shikama, Hironobu Umemoto, Keisuke Ohdaira, Takashi Nishiyama, Hideo Horibe
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