The 64th JSAP Spring Meeting 2017
Session ID : 15p-301-4
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Plasma processing in SiC power devices fabrication
*Shinsuke Harada, Hironori Yoshioka, Hidenori Koketsu, Ryoji Kosugi, Tomohisa Kato
Author information
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