The 64th JSAP Spring Meeting 2017
Session ID : 17a-313-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Etching of amorphous carbon layer (a-C) by fluorine and fluorocarbon ions (F+, CF+, CF3+)
*Kazuhiro Karahashi, Hu Li, Kentaro Yamada, Tomoko Ito, Satoshi Numazawa, Ken Machida, Kiyoshi Ishikawa, Satoshi Hamaguchi
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