The 64th JSAP Spring Meeting 2017
Session ID : 17a-313-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
First Principle Study on the Effects of Hydrogen on Transparent Conducting Oxide Etching
*HU LI, Pascal Friederich, Karin Fink, Wolfgang Wenzel, Kazuhiro Karahashi, Masanaga Fukasawa, Kazunori Nagahata, Tetsuya Tatsumi, Satoshi Hamaguchi
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