The 64th JSAP Spring Meeting 2017
Session ID : 15p-304-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Properties of amorphous cobalt alloy as a single layer diffusion barrier for LSI interconnections
Details
Article 1st page
