JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 64th JSAP Spring Meeting 2017
Session ID : 16p-315-2
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The History and New Development of the Helium Ion Microscopy Technology with ZEISS ORION NanoFab
*Yongkai Zhou
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Keywords: 16p-315-2, GFIS, HIM, Orion
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© 2017 The Japan Society of Applied Physics
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