The 64th JSAP Spring Meeting 2017
Session ID : 16p-E206-12
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Buckling analysis of fine pattern structures of a semiconductor device using molecular dynamics and finite element methods
*Kenji Koshiishi, Reiko Saito, Sachiyo Ito, Yohei Tamura, Shunsuke Imaizumi, So Takamoto, Satosh Izumi
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