The 64th JSAP Spring Meeting 2017
Session ID : 16p-502-8
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Ga2O3 Wafer Process Technology for Power Devices
*Akito Kuramata, Kimiyoshi Koshi, Kohei Sasaki, Ken Goto, Shinya Watanabe, Yu Yamaoka, Daiki Wakimoto, Quang Tu Thieu, Takekazu Masui, Shigenobu Yamakoshi, Hisashi Murakami, Yoshinao Kumagai, Masataka Higashiwaki
Author information
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