JSAP Annual Meetings Extended Abstracts
Online ISSN : 2436-7613
The 64th JSAP Spring Meeting 2017
Session ID : 16p-412-9
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Enhancement of ION of GeOI TFETs using low energy BF2 ion implantation
*Takumi KatohRyo MathumuraRyotaro TakaguchiMithuru TakenakaShinichi Takagi
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Keywords: 16p-412-9, TFET, Ge, BF2
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© 2017 The Japan Society of Applied Physics
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