The 64th JSAP Spring Meeting 2017
Session ID : 15a-503-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Growth of AlGaN (0001) epitaxial layer on Ga2O3 (-201) substrate with SiNx-dots mask
Details
Article 1st page
