The 64th JSAP Spring Meeting 2017
Session ID : 16a-P1-35
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Preliminary Application of simulation software (PEGASUS) to a Plasma-Based Ion Implantation
*Tomohiro Mizutane, Takuya Kano, Satoaki Oka, Yoshiki Hirata, Koji Kakugawa, Akane Yamashiro, Eriko Kunichika, Takeshi Tanaka
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