The 64th JSAP Spring Meeting 2017
Session ID : 16p-F203-2
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Spring Meeting
Number : 64
Location : [in Japanese]
Date : March 14, 2017 - March 17, 2017
Investigating Crystal Orientation of Sputtering Deposited MoS2 Thin Film by Analyzing Scaling Behavior of The Surface Roughness
*SEIYA ISHIHARA, BUNTA OHNO, YUSUKE HIBINO, NAOMI SAWAMOTO, TAKUMI OHASHI, KENTAROU MATSUURA, HITOSHI WAKABAYASHI, ATSUSHI OGURA
Author information
Keywords:
16p-F203-2,
Molybdenum disulfide
Details
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