The 78th JSAP Autumn Meeting 2017
Session ID : 8p-A410-1
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Tailored Femtosecond Bessel Beam Processing - Application to Through Si Vias for 3D Si ICs -
Keywords:
8p-A410-1,
JSAP-OSA Joint Symposia 2017,
Strong Light Excitation Phenomena Applied to Materials and Bio Engneering,
femtosecond Bessel beam,
Tailored beam processing,
through Si hole
Details
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