The 78th JSAP Autumn Meeting 2017
Session ID : 6a-C24-9
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Nanoscale investigation of the power semiconductor device by the AFM/KFM/SCFM
Keywords:
6a-C24-9,
Scanning Capacitance Force Microscope,
power semiconductor device,
SiC-power MOSFET
Details
Article 1st page
