The 78th JSAP Autumn Meeting 2017
Session ID : 5p-S41-13
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Investigation of Suitable Approximation Order of 2-variable Function of Exposure Conditions for Half-pitch 50 nm Line-and-space Pattern Formed by Electron-beam Lithography
Details
Article 1st page
