The 78th JSAP Autumn Meeting 2017
Session ID : 5a-A413-5
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Formation mechanism of electronegative oxygen ions generated with after-arc plasma using time-resolved probe and RF probe methods
*Hisashi Kitami, Junichi Nomoto, Toshiyuki Sakemi, Hisao Makino, Yasushi Aoki, Tetsuya Yamamoto
Author information
Details
Article 1st page
