The 78th JSAP Autumn Meeting 2017
Session ID : 5a-A413-7
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
Excitation kinetic model for argon process plasma diagnostics by spectroscopic measurement based on collisional-radiative model
Keywords:
5a-A413-7,
process plasma diagnostics,
optical emission spectroscopic measurement,
collisional-radiative model
Details
Article 1st page
