The 78th JSAP Autumn Meeting 2017
Session ID : 5a-C11-6
Conference information
Host: The Japan Society of Applied Physics
Name : JSAP Autumn Meeting
Number : 78
Location : [in Japanese]
Date : September 05, 2017 - September 08, 2017
A study of fabrication condition of GeO2layer in HfO2/GeO2/Ge structure
*Shotaro Wachi, Yoshitaka Iwazaki, Tomo Ueno, Koji Yamada, Yoshinori Kitahara, Mitaro Namiki
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